Closed channel fabrication using micromolding of metallic glass

Casting and molding are attractive options for low cost mass production. Metallic glasses may avoid many of the problems associated with micromolding of metals such as high temperatures and pressures, costly mold production, and shrinkage due to crystallization. In this study, we have produced 100 μm2, enclosed channels in metallic glass using a novel multilayer Si stack micromolding process. Scanning electron microscope (SEM) images of the enclosed channels are provided to verify that the closed channels extended through the sample.