Reliability-based design of MEMS mechanisms by topology optimization

This paper presents a methodology for the design of micro-electro-mechanical systems (MEMS) by topology optimization accounting for stochastic loading and boundary conditions as well as material properties. This methodology combines recent advances in material-based topology optimization for compliant mechanisms undergoing large displacements and design optimization under uncertainties using first order reliability analysis methods. The performance measure approach is applied to the formulation of the optimization problem. The structural response is predicted by a co-rotational finite element formulation and the design and imperfection sensitivities are evaluated by an adjoint method. The methodology is illustrated by the topology optimization of a compliant mechanism. The results show the importance of accounting for the stochastic nature of the micro-system in the topology optimization process.