Contaminant particles removal by negative air ionic cleaner in industrial minienvironment for IC manufacturing processes

This study was carried out in a closed test chamber under natural decay, negative ionic air cleaner application, as well as air mixing mechanism with negative ionic air cleaner. Among three operation modes, the air mixing mechanism with negative ionic air cleaner can reduce particles better under the flow field condition. In the air mixing, especially vigorous one (5 ACH (Air Changes per hour)), enhanced the air cleaning effect. The highest removal efficiency was measured at a height of 0.6 m from the floor and it was decreased substantially with an increase in height. The relative effectiveness of negative ionic air cleaners was predicted to decrease with an increasing particle size. We also found that there was a limited horizontal diffusion of ions. The empirical curves fit based for the concentration gradient of NAI (Negative air ionization) generated was developed for estimating the NAI concentration with different heights and distances from the source of negative ionic air cleaner discharge.