The improved performance of one-side actuating diaphragm micropump for a liquid cooling system

In our previous study, a new type of a one-side actuating diaphragm micropump was developed to drain water using diaphragm vibration at the rate of 1.2 ml/s [H.K. Ma, B.R. Hou, H.Y. Wu, C.Y. Lin, J.J. Gao, Development and application of a diaphragm micropump with piezoelectric device, Accepted by Microsystem Technologies (2007)]. This study indicates that the performance of the micropump is strongly affected by the design of the check valves and the pump chambers, input voltage, and frequency. The improved design shows that the maximum flow rate is 2.35 ml/s, and the maximum pump head is 6404 Pa under ± 50 V. In addition, the thermal resistances of the cold plate on a 30 W dummy heater in the open system and the circulation liquid cooling system are 0.27 °C/W and 0.45 °C/W, respectively, in laptop application.