Dill’s parameter measure in liquid photosensitive materials via interferometric method

In this work, we have studied the behavior of photosensitive materials in the liquid state when exposed to light with the aim of measuring the chemical kinetics in such state. The chemical kinetics is found determining the Dill’s parameter through the fit of the refractive index variations with energy per exposed area, based on a model proposed by Dill. The measurements were performed during a blue light exposure process of using a high precision Michelson Interferometer in liquid AZ-1518 photoresist.