Synthesis and characterization of organo-soluble and photosensitive benzocyclobutene-terminated imides

Three kinds of benzocyclobutene (BCB)-terminated imide monomers have been synthesized by the imidization and Heck reaction. The obtained BCB monomers exhibit good solubility in a wide range of organic solvents at room temperature. The BCB monomers show an exothermal curing behavior in the range of 220–270 °C. The curing kinetic parameters, the apparent activation energy (Ea), the frequency factor (A) and the reaction order (n), are obtained by non-isothermal DSC method. The cured BCB resins exhibit good thermal stability (Td5 > 435 °C), high glass transition temperature (Tg > 300 °C) and low dielectric constant. Moreover, high quality negative patterns of the BCB films are obtained after the photolithography.