Title of article :
Uniformity of Iron-Doped Semi-Insulating InP Wafers
Author/Authors :
Kang Xiaodong، نويسنده , , Mao Luhong، نويسنده , , Yang Ruixia، نويسنده , , Zhou Xiaolong، نويسنده , , Sun Tongnian، نويسنده , , Sun Niefeng، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Pages :
3
From page :
360
To page :
362
Abstract :
50 ∼ 100 mm diameter iron-doped InP crystal was grown by in-situ phosphorous injection synthesis liquid encapsulated Czochraski (LEC) method. Samples were characterized by high speed photoluminescence (PI) mapping and Etch pit density (EPD) mapping method. The perfection of these samples were studied and compared. 100 mm diameter InP single crystals were successfully developed by rapid P-injection in-situ synthesis LEC method. The EPD across the ingot was less than 5 × 104 cm−2, which was almost equal to the crystals of diameter 50 and 76 mm. By adjusting the thermal field and ensuring the chemical stoichiometry, InP crystals of larger diameters and good performance could be developed.
Keywords :
InP , semi-insulating , Uniformity
Journal title :
Journal of Rare Earths
Serial Year :
2007
Journal title :
Journal of Rare Earths
Record number :
1244569
Link To Document :
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