Optical constants of Er2O3-Al2O3 films studied by spectroscopic ellipsometry

Er2O3-Al2O3 film was deposited on the Si(001) substrate by radio frequency magnetron technique at room temperature. The sample was annealed at 450, 600 and 750 °C for 30 min in O2 ambience, respectively. The optical constants were studied by spectroscopic ellipsometry for both the as-deposited and the annealed samples. The proper values of refractive index indicated that it could be a useful material for solar cells.