Electro-tunable one-dimensional photonic crystal structures based on grooved silicon infiltrated with liquid crystal

The paper reports on composite periodic structures fabricated by means of wet anisotropic etching of (1 1 0)-oriented Si on a SOI platform and infiltrated with liquid crystal E7. The electro-optical effect under low voltages was registered for inter-digital structures by both optical microscopy and micro-Raman spectroscopy.