Luminescent properties of CaTiO3:Pr thin-film phosphor deposited on ZnO/ITO/glass substrate

Red-emitting CaTiO3:Pr phosphor thin films were deposited on glass, ZnO/ITO/glass, and ITO/glass substrates by RF magnetron sputtering. The effects of various substrates and heat treatment on the structural and luminous properties were investigated. The films deposited on ZnO/ITO/glass exhibited superior crystallinity and more enhanced PL and CL properties compared with those on ITO/glass. The intermediate ZnO layer between phosphor film and ITO contributed to the growing behaviors and the roughening of CaTiO3:Pr phosphor thin films, and consequently, to the excellent luminescence. The luminescent properties of the films were improved by following heat-treatment due to a combination of factors, namely the transformation from amorphous to poly crystalline phases, the activation of the activators, and the elimination of microdefects.