Effects of the passivation layer deposition temperature on the electrical and optical properties of GaN-based light-emitting diodes

In this paper, silicon oxynitride is deposited through plasma-enhanced chemical vapor deposition (PECVD) to serve as an antireflection passivation layer. We have studied the effects of the deposition temperature (from 100 to 300 °C) on the electrical and optical performances of GaN-LEDs. It is found that the light output of GaN-LEDs improves greatly after the deposition of SiON antireflection passivation layer at 200 °C and is better than that of GaN-LEDs whose layers are deposited at 100 and 300 °C. The electrical properties of GaN-LED do not degrade at 100 and 200 °C, but degrade significantly at 300 °C.