Minimizing the torque ripple of variable capacitance electrostatic micromotors

In this paper, an approach for minimizing the torque ripple of a variable capacitance electrostatic micromotor is presented. To this end, a practical design for a variable capacitance electrostatic micromotor has been analyzed using a two-dimensional, numerical, finite element method. The procedure presented here for minimizing the torque ripple consists of two stages: optimization of the excitation sequence and optimization of the geometric parameters. Several excitation sequences have been studied for minimizing the torque ripple, and the optimal excitation sequence has been found for supplying the micromotor. Geometric parameters are optimized to minimize torque ripple. The geometric optimization procedure is based on the successive sampling of geometric parameters. These parameters include stator tooth width, rotor tooth width and slot radius.