Electrostatic micro-ozone fan that utilizes ionic wind induced in pin-to-plate corona discharge system

An electrostatic micro-ozone fan that utilizes the ionic wind induced in a pin-to-plate gas discharge field was developed for utilizing it in the micro-cooling system of electronic devices and a localized oxidization system, and its fundamental characteristics were elucidated through experiments and calculations. The fan consisted of a pin electrode and a plate electrode with a hole. When a high voltage was applied between the electrodes, the ionic wind containing ions and ozone flowed through the hole of the plate electrode toward a heated target. An experimental investigation indicated that the heat transfer could be enhanced by applying a positive voltage and approximately 10-ppm ozone could be generated and made to flow by utilizing the negative corona discharge. The experimental results were in good agreement with the numerical calculations performed in three steps, i.e., the calculation of the corona discharge field, calculation of the ionic wind induced by the migration of ions, and calculation of ozone generation in the corona discharge field. By performing a parametric experiment, the optimal geometry was deduced and local cooling was demonstrated by using a miniature fan.