Analysis of charged device model (CDM) ESD in MEMS

The effect of charge injection due to CDM ESD in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, ESD injected charge produces a change for the stiction effect which is inversely proportional to the square of the plate area and a change in the dielectric layer breakdown which is inversely proportional to the plate area. An electric field model is developed to examine charge and voltage modes in MEMS. A charge injection test method is proposed to determine the susceptibility of MEMS to CDM ESD.