Analysis of electrostatic discharge suppressors with ultra-low capacitance used for IC protection

The TDMM was successfully used to analyze the capacitance, the electric field, and the ESD current of an ESD suppressor. The obtained capacitance was also validated by measurement data. It is found that the maximum electric fields in the air gap between two discharge electrodes for the air gap width of 5–50 μm are much higher than the threshold electric field for air breakdown. A maximum ESD current of 4.7 mA was obtained during an ESD event, which may be sufficient to cause a malfunction in a high sensitivity integrated circuit.