Designing the 3D electrostatic microgenerator

This paper discusses the design and simulation of a 3D electrostatic generator, one part of power supply component of the self-powered microsystem , which is able to provide enough energy to power up smart sensor chains. In this case the most suitable method to gather enough electrical energy is so-called energy harvesting principle . The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor . The structure is designed and modeled as three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure (around 100 Hz) using the modified long cantilever design, minimal area of the chip, the ability to work in all 3 axes of coordinate system and the ability to be tuned to reach desired parameters shows further development.