Study of 1-3 composite transducer for ultrasonic wirebonding application

Lead zirconate titanate (PZT)/epoxy 1-3 composites consisted of PZT rods embedded in an epoxy matrix were used as the driving elements in an ultrasonic wirebonding transducer for microelectronic packaging. The performance of the 1-3 composite PZT transducer with 0.91 volume fraction of PZT has been studied. The composite transducer has fewer lateral vibrations and higher damping. It has the potential to be used in new generation high-speed and fine-pitch ultrasonic wirebonding machines.