Micro-patterning of sol–gel-derived PZT thin film with SAM

Micro-patterns of Pb(Zr0.53 Ti0.47)O3, PZT, thin films with a morphotropic phase boundary (MPB) composition were prepared from molecular-designed PZT precursor solution by using self-assembled monolayer (SAM) as a template. This method includes deposition of SAM followed by the optical etching by exposing the SAM to the UV-light, leading to the patterned SAM as a selective deposition template. The pattern of SAM was formed by irradiating UV-light to the SAM on substrate through a metal mask for the selective deposition of patterned PZT precursor films from alkoxide-derived precursor solution. As a result, patterned ferroelectric PZT films with good electrical properties in micrometer size could be successfully deposited.