Micropatterning of SnO2 thin films using hydrophobic–hydrophilic patterned surface

SnO2 micropatterns were prepared by using hydrophobic–hydrophilic patterned surfaces. Hydrophobic–hydrophilic patterned surfaces were prepared by selective UV-irradiation through a photomask on multilayered films of a very thin TiO2 gel layer and a hydrolyzed fluoroalkyltrimethoxysilane layer. SnO2 precursor solution prepared from SnCl2 and ethanol was coated on the hydrophobic–hydrophilic patterned surfaces. Convexly shaped SnO2 patterns were formed on hydrophilic area of the patterned surfaces. Thickness of these patterns was more than 1 μm. This patterning technique must have a wide variety of applications such as fabrication of micro-optical components and micropatterned oxide thin films.