Studies on the structural, electrical and optical properties of Al-doped ZnO thin films prepared by chemical spray deposition

Aluminium-doped zinc oxide films have been prepared by chemical spray pyrolysis technique. Variation of structural, morphological, electrical and optical properties with doping concentration is investigated in detail. The films were highly transparent to visible radiation and electrically conductive. XRD studies have shown that the films were polycrystalline in nature with (0 0 2) preferred orientation. SEM studies have revealed the smooth polycrystalline morphology of the films. Films deposited at optimum conditions have exhibited a resistivity of 2.45 × 10−4 Ωm with an optical transmittance of 97% at 550 nm.