A novel method for preparation of dense silicon-based ceramics

The dense ceramic part was prepared firstly using silazane with filler. The composition, structure and ceramic yield of silazane were characterized by elemental analysis, nuclear magnetic resonance (NMR), IR and thermogravimetric analysis (TGA). The ceramic yield was 63 wt% upon pyrolysis at 1000 °C under N2 atmosphere. The fabrication of ceramic part involved cross-linking of the silazane with metallic fillers (Ti particles) followed by a polymer-to-ceramic transformation step. Near net shape manufacturing of polymer derived ceramics could be achieved. The strength of ceramic parts could achieve 450 ± 15 MPa and scanning electron microscopy (SEM) observation showed that there was very low porosity on the fracture surface of pyrolysed body.