Electrospun titanium dioxide nanofiber humidity sensors with high sensitivity

Titanium dioxide nanofibers were synthesized using electrospinning technique. The nanofibers were porous with an average diameter and length of ∼150 nm and 200 μm, respectively. Humidity-sensing devices were fabricated by lithographically defined aluminum electrodes on top of the nanofibers deposited on silicon dioxide grown thermally on a silicon substrate. The performance of a TiO2 nanofiber humidity sensor was tested by AC and DC electrical measurements at 40–90% relative humidity. The response and the recovery time were 1 s and 4 s, respectively, between 40% and 90% relative humidity. The sensitivity of the TiO2 humidity sensor in the range of 40–90% RH was 150 MΩ/%RH and 20 MΩ/%RH at 10 Hz and 100 Hz, respectively. The excellent sensing characteristics are attributed to the porous nature and the small diameter of the nanofibers.