High energy density capacitors based on 0.88BaTiO3–0.12Bi(Mg0.5, Ti0.5)O3/PbZrO3 multilayered thin films

Multilayered thin films consisting of both 0.88BaTiO3–0.12Bi(Mg0.5,Ti0.5)O3 ferroelectric layers and PbZrO3 antiferroelectric layers were prepared by sol–gel method, exhibiting high dielectric permittivity, large polarization, high recoverable energy storage density and high energy storage efficiency. A maximum polarization of 93 μC/cm2, recoverable energy storage density of 24.7 J/cm3 and energy storage efficiency of ~60% have been achieved at an electric field of 1050 kV/cm. Furthermore, the energy storage performance of the multilayered thin films was improved by modified layer-by-layer annealing process, where larger polarization (115 μC/cm2), higher recoverable energy storage density (33 J/cm3) and higher energy storage efficiency (~70%) were obtained.