Title of article
Vertical ZnO nanorod array as an effective hydrogen gas sensor
Author/Authors
Y.T. Lim، نويسنده , , J.Y. Son، نويسنده , , J.-S. Rhee، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
4
From page
887
To page
890
Abstract
We report a vertical ZnO nanorod array as a highly sensitive hydrogen gas sensor. The vertical ZnO nanorod array on an Nb/Si substrate was fabricated using an anodized aluminum oxide nanotemplate and an atomic layer deposition method. The vertical ZnO nanorod array hydrogen gas sensor exhibited a high sensitivity for hydrogen in a wide concentration range.
Keywords
ZnO atomic layer deposition , Vertical nanorod array , Gas sensor , Semiconductor
Journal title
Ceramics International
Serial Year
2013
Journal title
Ceramics International
Record number
1277183
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