Title of article :
Vertical ZnO nanorod array as an effective hydrogen gas sensor
Author/Authors :
Y.T. Lim، نويسنده , , J.Y. Son، نويسنده , , J.-S. Rhee، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2013
Abstract :
We report a vertical ZnO nanorod array as a highly sensitive hydrogen gas sensor. The vertical ZnO nanorod array on an Nb/Si substrate was fabricated using an anodized aluminum oxide nanotemplate and an atomic layer deposition method. The vertical ZnO nanorod array hydrogen gas sensor exhibited a high sensitivity for hydrogen in a wide concentration range.
Keywords :
ZnO atomic layer deposition , Vertical nanorod array , Gas sensor , Semiconductor
Journal title :
Ceramics International
Journal title :
Ceramics International
