• Title of article

    Dislocation dynamics in heterojunction bipolar transistor under current induced thermal stress

  • Author/Authors

    Tsai، C.T. نويسنده , , Liou، L.L. نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    -382
  • From page
    383
  • To page
    0
  • Abstract
    Dislocation generation and multiplication in heterojunction bipolar transistors (HBTs) under electrical bias was studied using a finite element model. This model was developed to solve a physical viscoplastic solid mechanics problem using a time-dependent constitutive equation relating the dislocation dynamics to plastic deformation. The dislocations in HBTs are generated by the excessive stresses including thermal stress generated by the temperature change in the device during operation. It was found that the dislocation generation rate at the early stage and the stationary dislocation densities depend strongly on the current density. © 1999 Elsevier Science Ltd. All rights reserved.
  • Keywords
    Silicon nitride , R.f. reactive sputtering , Interference filter , Oxygen resonance RBS
  • Journal title
    MICROELECTRONICS RELIABILITY
  • Serial Year
    1999
  • Journal title
    MICROELECTRONICS RELIABILITY
  • Record number

    12923