Thin-film characterization by grazing incidence X-ray diffraction and multiple beam interference Original Research Article

An overview is given of the application of two-beam and multiple-beam approach to grazing incidence X-ray diffraction (GIXD) for single-crystal thin film characterization. Crystallographic orientation, lattice mismatch, order parameter, and phase of in-plane reflection for various thin film systems are determined by using conventional two-beam GIXD and resonance three-beam GIXD. The diffraction technique, analysis procedure, and theoretical consideration are also presented and discussed.