High-efficiency high-energy-resolution spectrometer for inelastic X-ray scattering Original Research Article

A nine-element analyzer system for inelastic X-ray scattering has been designed and constructed. Each individual analyzer crystal is carefully aligned with an inverse joystick goniometer. For the analyzers silicon wafers with 100 mm diameter are spherically bent to 1 or 0.85 m radius, respectively. Additionally, an analyzer with an extra small radius of 0.182 m and diameter of 100 mm was constructed for X-ray absorption spectroscopy in fluorescence mode. All analyzer crystals with large radius have highly uniform focusing property. The total energy resolution is approximately 0.5 eV at backscattering for the 1 m radius Si(440) analyzer array and approximately 4 eV for the 0.182 m radius Si(440) analyzer at 6493 eV.