Nano-sized patterns derived from a SiCN preceramic polymer: Fabrication and their characterization

A microfabrication of ceramic materials with a low shrinkage has created inevitable demands in the fields of micro total analysis systems (μ-TAS) and microfluidic devices with thermal, chemical, and mechanical stability. In this study, nano-sized patterns were prepared using a soft lithographic technique, followed by the UV and thermal curation of a non-oxide SiCN preceramic polymer. The characterization of the thermal and mechanical properties of the cured preceramic polymer revealed that it becomes ceramic-like after the heat treatment at higher temperature than 600 °C. The heat-treated nano-sized patterns showed a low linear shrinkage as well as good chemical stability and optical properties. The results showed the feasibility of enormous potentials of the cured preceramic polymer because of the low shrinkage, the high optical transparency, and the thermal and chemical stability.