Stochastic programming based capacity planning for semiconductor wafer fab with uncertain demand and capacity

Capacity planning is a challenging problem in semiconductor manufacturing industry due to high uncertainties both in market and manufacturing systems, short product life cycle, and expensive capital invest. To tackle this problem, this paper proposes a scenario-based stochastic programming model which considers demand and capacity uncertainties via scenarios, where the overall equipment efficiency is employed to describe the uncertain capacity for the first time. Based on the decentralized structure of tool procurement, production, stockout, and inventory decision-making processes, recourse approximation strategies are presented with varying degree of information share. The computational experiments show that the resulting tool set is robust enough to cope with the changes in capacity with the expected profits being maximized for different scenarios, and the scheme can generate pretty good solutions in reasonable computational time.