Introductory invited paper On the time-dependent degradation of LDD n-MOSFETs under hot-carrier stress

A unified model for hol-carrier-induced degradation in LDD n-MOSFETs is presented. A novel oxide spacer charge pumping method enables interface trap generation in the spacer and overlap/channel regions to be distinctly separated. An excellent correlation between trap generation in the spacer region and linear drain current degradation at high gale voltage is observed. Moreover, trap generation in the overlap/channel region is found to correlate well with linear drain current degradation at low gate voltage. The results point unarnbiguously to a twomechanism degradation model involving drain resistance increase by trap generation in the spacer region, and carrier mobility reduction by trap generation in the overlap/channel region. The combined effect of a timeindependent lateral electron temperature profile and a finite density of interface trap precursors within the LDD region leads to a self-limiting degradation behavior. This insight forms the basis of a time-dependent trap generation model, which indicates the existence of a single degradation curve. The fact that the degradation curves at different stress drain voltages fall onto a time-scaled version of the single degradation curve provides strong support for the model. This also offers a straightforward and yet accurate means by which the hot-carrier lifetime corresponding to a specific failure criterion may be extracted. Finally, a power-law relationship between hot-carrier lifetime and substrate current is also observed for the LDD devices, thus preserving the physical essence based on which earlier lifetime models for conventional drain devices are established. © 1999 Elsevier Science Ltd. All rights reserved.