Dielectric properties of Ca(Zr0.05Ti0.95)O3 thin films prepared by chemical solution deposition

Ca(Zr0.05Ti0.95)O3 (CZT) thin films were grown on Pt(1 1 1)/Ti/SiO2/Si(1 0 0) substrates by the soft chemical method. The films were deposited from spin-coating technique and annealed at 928 K for 4 h under oxygen atmosphere. CZT films present orthorhombic structure with a crack free and granular microstructure. Atomic force microscopy and field-emission scanning electron microscopy showed that CZT present grains with about 47 nm and thickness about 450 nm. Dielectric constant and dielectric loss of the films was approximately 210 at 100 kHz and 0.032 at 1 MHz. The Au/CZT/Pt capacitor shows a hysteresis loop with remnant polarization of image, and coercive field of 18 kV/cm, at an applied voltage of 6 V. The leakage current density was about image at 3 V. Dielectric constant–voltage curve is located at zero bias field suggesting the absence of internal electric fields.