Dynamic analysis of an electrostatic compressor

This paper presents an analytical approach for modeling the transient dynamic forces in a diaphragm compressor which operates under the action of an electrostatically actuated diaphragm. An experimentally validated, quasi-static model for a diaphragm compressor for electronics cooling was previously developed in which dynamic effects were neglected. In the new model, the dynamic forces induced due to the finite time necessary for deflection of the diaphragm are taken into consideration using the segmentation approach developed earlier. Results from the analytical model compare favorably with those from a detailed numerical simulation as well as with experimental measurements available in the literature. The analytical dynamic model is applied to two different pumping devices to illustrate the effects of the dynamic forces on the overall performance of the device. The effect of pumping frequency of the device on the operating voltage is also explored.