Dynamic behaviour of the systems Be–C, Be–W and C–W

The Monte Carlo program TRIDYN is applied to investigate the dynamic behaviour of the binary systems Be–C, Be–W and C–W, where one species represents the bombarding atom and the other the target atom. The fluence dependence of the particle reflection coefficient, of the sputtering yield, of the target composition, and of implantation values is calculated for incident energies between 300 eV and 10 keV (in a few cases up to 1 MeV) and for various angles of incidence.