Thin film Si solar cell fabricated at low temperature

Research and development of our film Si solar cells are reviewed. Our developed film polycrystalline Si (poly-Si) cells are well described by the structure of natural surface texture and enhanced absorption with a back reflector (STAR), where the active poly-Si layer is fabricated by plasma chemical vapor deposition (CVD) at low temperature. The cell with a thickness of 2.0 μm demonstrated an intrinsic efficiency of 10.7% (aperture 10.1%). By combining poly-Si cell with an a-Si cell, a stabilized efficiency of 12% has been reached for a-Si:H/poly-Si/poly-Si cell structure.