Phosphanstabilisierte Silber(I)–Carboxylate: Synthese und Verwendung in der Silber-CVD

The synthesis of the silver(I)–carboxylate complexes [(R′3P)nAgO2CR] (n=1, R′=nBu: 3a, R=CF3; 3b, R=C2F5; R′=C6H4CH2NMe2-2: 3c, R=CF3; 3d, R=C2F5; n=2, R′=nBu: 4a, R=CF3; 4b: R=C2F5) succeeds, when [AgO2CR] (1a, R=CF3; 1b, R=C2F5) is reacted with n equivalents of PR′3 (2a, R′=nBu; 2b, R′=C6H4CH2NMe2-2) (n=1, 2); the yield amounts to 83–98%. Complexes 3 and 4 can be used for the deposition of silver on titaniumnitride-coated SiO2-wafers by the chemical vapour deposition (CVD) process, which could be shown by applying 4a as suitable precursor. REM studies show that closed silver layers were formed with a silver particle size between 50 and 100 nm.