Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems

In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding.