Consideration of piezoceramic actuator nonlinearity in the active isolation of deterministic vibration

There is an increasing need to effectively control micro-vibration in such fields as metrology, optics and micro-electronics. This paper describes the design of an adaptive feedforward strategy for vibration isolation of harmonic disturbance using a piezoelectric actuator with hysteretic behavior. A nonlinear analytical model of the piezoelectric actuator including a ferroelectric-like behavior is built using a Preisach model of hysteresis. Pre-multiplication of a single-frequency reference signal by the nonlinear model of the stack is investigated in order to effectively compensate the actuator nonlinearity. It is observed that a simple linear model of the stack is sufficient in the adaptation of a filtered-X LMS feedforward controller to effectively compensate the actuator nonlinearity, provided the reference signal has frequency components at the disturbance frequency and its higher harmonics.