Title of article
Diamond synthesis by plasma jet above a liquid surface
Author/Authors
Suzuki، نويسنده , , Takeyuki and Wada، نويسنده , , Satoshi and Tsukada، نويسنده , , Mitsuru and Yamazaki، نويسنده , , Tsutomu and Noma، نويسنده , , Tatsuo، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
4
From page
331
To page
334
Abstract
A new approach was proposed for the low-pressure diamond synthesis on high-resistant substrates using liquids as starting materials for carbon sources. The principle is to generate a DC plasma between the copper nozzle and the negatively-biased liquid surface under reduced pressure. The discharge continued with an applied voltage between 1.5 and 2 kV and at pressures between 30 and 50 kPa using a mixture of water– ethylene glycol solution. Plasma thus generated was led onto the silicon substrate placed horizontally and 1 mm over the nozzle top. The deposits distributed almost concentrically centered at the point directly above the nozzle axis. After deposition for 1 h, well-faceted diamond was formed in a limited region. The growth rate of the diamond film was 10 μm/h.
Keywords
Deposition , diamond , Plasma deposition , films , CVD
Journal title
Journal of the European Ceramic Society
Serial Year
2001
Journal title
Journal of the European Ceramic Society
Record number
1404961
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