• Title of article

    Diamond synthesis by plasma jet above a liquid surface

  • Author/Authors

    Suzuki، نويسنده , , Takeyuki and Wada، نويسنده , , Satoshi and Tsukada، نويسنده , , Mitsuru and Yamazaki، نويسنده , , Tsutomu and Noma، نويسنده , , Tatsuo، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    4
  • From page
    331
  • To page
    334
  • Abstract
    A new approach was proposed for the low-pressure diamond synthesis on high-resistant substrates using liquids as starting materials for carbon sources. The principle is to generate a DC plasma between the copper nozzle and the negatively-biased liquid surface under reduced pressure. The discharge continued with an applied voltage between 1.5 and 2 kV and at pressures between 30 and 50 kPa using a mixture of water– ethylene glycol solution. Plasma thus generated was led onto the silicon substrate placed horizontally and 1 mm over the nozzle top. The deposits distributed almost concentrically centered at the point directly above the nozzle axis. After deposition for 1 h, well-faceted diamond was formed in a limited region. The growth rate of the diamond film was 10 μm/h.
  • Keywords
    Deposition , diamond , Plasma deposition , films , CVD
  • Journal title
    Journal of the European Ceramic Society
  • Serial Year
    2001
  • Journal title
    Journal of the European Ceramic Society
  • Record number

    1404961