Thick-film temperature sensors on alumina and LTCC substrates

The electrical and microstructural characteristics of 1 kΩ/sq. thick-film thermistors with high positive or negative temperature coefficients of resistivity, i.e., PTC 5093 (Du Pont) and NTC 4993 (EMCA Remex), fired on alumina or co-fired on “green” low-temperature co-fired ceramic (LTCC) substrates, are compared. The active phase in both materials (the ruthenium oxide and the semiconducting spinel in the PTC and NTC thermistors, respectively) is not present in the dried films but is formed during firing. The differences in the measured electrical parameters (sheet resistivities, temperature dependence of resistivities and noise) of the thermistors, fired on alumina or on LTCC were attributed to the interactions between the thermistor layers and the glassy LTCC substrates. The inter-diffusion of oxides, mainly PbO and SiO2, was confirmed by microanalysis.