Light enhanced gas sensing properties of indium oxide and tin dioxide sensors

The effects of UV light illumination on the performance of SnO2 and In2O3 semiconductor gas sensors toward CO and NO2 are reported. The sample were prepared with DC sputtering in Ar atmospheres by the Rheotaxial Growth and Thermal Oxidation (RGTO) technique and with reactive magnetron sputtering in Ar and O2 atmosphere, respectively. Results are quite promising for the development of sensor working at room temperature.