Author/Authors :
Guidi، نويسنده , , V and Boscarino، نويسنده , , D and Comini، نويسنده , , E and Faglia، نويسنده , , G and Ferroni، نويسنده , , M and Malagù، نويسنده , , C and Martinelli، نويسنده , , G and Rigato، نويسنده , , V and Sberveglieri، نويسنده , , G، نويسنده ,
Abstract :
Thin films of W–Ti–O mixed oxides were prepared by reactive r.f. sputtering of various Ti/W targets. Depending on the Ti/W content and annealing temperature, nanosized films with different polycrystalline structure were achieved. The layers exhibit good sensing capability to NO2 with scarce influence by CO.
Keywords :
Gas-sensor , sputtering , TiO , WO3
