Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors

Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors, which allow an efficient miniaturization, have been developed. These sensors have been prepared using standard techniques of semiconductor processing. Both sensor types exhibit a high, near-Nernstian pH sensitivity of about 54 mV per decade. Due to the enlargement of the active sensor area, the measured capacitance values increase up to a factor of 30.