Integrated oxygen sensors based on Mg-doped SrTiO3 fabricated by screen-printing

This paper describes the fabrication and testing of Mg-doped SrTiO3 thick-film oxygen sensors with an integrated Pt heater. The results show that the sensor exhibits a PO2 dependence according to R∝P−1/4O2 in the considered PO2 range (2.5×10−5 bar<PO2<0.21 bar) and a response and recovery time of 1–2 and 50 s, respectively. A temperature of 600°C could be reached by a relative low power consumption of the Pt heater.