Title of article
Sputtered thin films of CuBr for ammonia microsensors: morphology, composition and ageing
Author/Authors
Bendahan، نويسنده , , M. and Lauque، نويسنده , , P. and Lambert-Mauriat، نويسنده , , C. and Carchano، نويسنده , , H. and Seguin، نويسنده , , J.-L.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
6
From page
6
To page
11
Abstract
Sensitive and selective ammonia sensors were realised by sputter depositing a CuBr film on copper interdigitated electrodes. The effect of the self bias voltage on the composition and morphology of the films was analysed. Films deposited with a self bias voltage above 400 V are well adapted to sensor application since they show a large specific area. Ageing of the films is related to copper diffusion from the electrodes into an originally sub-stoichiometric Cu1−xBr film.
Keywords
Gas sensor , sputtering , Ammonia , Copper bromide , Thin film
Journal title
Sensors and Actuators B: Chemical
Serial Year
2002
Journal title
Sensors and Actuators B: Chemical
Record number
1412902
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