Title of article :
Crystallographic characterization of In2O3 films deposited by spray pyrolysis
Author/Authors :
G. Korotcenkov، نويسنده , , G. and Brinzari، نويسنده , , V. and Cerneavschi، نويسنده , , A. and Cornet، نويسنده , , A. Belleni Morante، نويسنده , , J. and Cabot، نويسنده , , A. and Arbiol، نويسنده , , J.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Abstract :
Results of a detailed structural characterization of In2O3 films, deposited by spray pyrolysis from InCl3–water solutions, are presented in this paper. The influence of technological parameters such as precursor concentration in sprayed solution, pyrolysis temperature, and film thickness on morphology, crystallite sizes, texturing, and strains were analyzed. SEM, TEM, XRD, AFM, HRTEM, and laser ellipsometry methods were applied for these purposes. An explanation of observed regularities is also given.
Keywords :
In2O3 , Spray pyrolysis , characterization , Film , structure
Journal title :
Sensors and Actuators B: Chemical
Journal title :
Sensors and Actuators B: Chemical
