Author/Authors :
Guidi، نويسنده , , V. and Butturi، نويسنده , , M.A. and Carotta، نويسنده , , M.C. and Cavicchi، نويسنده , , B. and Ferroni، نويسنده , , M. and Malagù، نويسنده , , C. and Martinelli، نويسنده , , G. and Vincenzi، نويسنده , , D. and Sacerdoti، نويسنده , , M. T. Zen، نويسنده , , M.، نويسنده ,
Abstract :
We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol–gel method or laser-assisted spray pyrolysis. We also considered some techniques to maintain the stability of a nanostructure for long-term usage of the sensing layers. We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units.
