Capacitive-type humidity sensors fabricated using the offset lithographic printing process

This paper reports on the fabrication of a novel capacitive-type relative humidity sensor of which the electrode films are deposited using the high speed printing process, offset lithography. Parallel-plate capacitor sensor structures have been formed with a number of humidity sensitive polymers including polyimide and polyethersulphone (PES). Details of the fabrication process and sensor characteristics such as linearity, sensitivity and response time are included.