Robust design of quartz crystal microbalance using finite element and Taguchi method

This article presents an efficient method for the design of quartz crystal microbalance (QCM). The effects of QCM’s resonant frequency influenced by the variation of the deposited mass are studied by using the finite element analysis (FEA) software. The advantages of the demonstrated concept are the flexibility of the program structure and the reduction of the cost. Moreover, the well-known Taguchi method (TM) is applied to obtain the high Q-factor of QCM for robust design. The simulation results including resonant frequency, thickness-shear mode (TSM) and frequency spectrum are agreed well with the theoretical values and experimental studies.