Title of article
The gas sensing characteristics of ITO thin film prepared by sol–gel method
Author/Authors
Jiao، نويسنده , , Zheng and Wu، نويسنده , , Minghong and Gu، نويسنده , , Jianzhong and Sun، نويسنده , , Xilian، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
6
From page
216
To page
221
Abstract
In this paper, indium tin oxide (ITO) thin films were prepared by sol–gel method. The gas sensing properties of ITO thin films were investigated. The ITO thin films have better sensitivity to ethanol and nitrogen dioxide, but have little response to H2, gasoline, liquid petrol gas (LPG), CH4 and CO, Pd, Pt, CaO, Th2O3 and rare earth elements were added to improve gas sensing characteristics. It was found that the influences of the additives on gas sensing characteristics were slight. The stability of ITO thin films is good.
Keywords
Thin film , Sol–gel , Gas sensor , Ito
Journal title
Sensors and Actuators B: Chemical
Serial Year
2003
Journal title
Sensors and Actuators B: Chemical
Record number
1413212
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