Performance of unimorph cantilever generator using Cr/Nb doped Pb(Zr0.54Ti0.46)O3 thick film for energy harvesting device applications

Structural and piezoelectric properties of Pb(Zr0.54Ti0.46)O3 + 0.2 wt% Cr2O3 + 1.0 wt% Nb2O5 (PZT-CN) thick films were investigated for potential use in energy harvesting device applications. The PZT-CN thick films, fabricated by a conventional tape casting process, were successfully synthesized at a sintering temperature of 1100 °C. The sintered film exhibited excellent piezoelectric properties of d33 = 365 pC/N, ε 33 T / ε 0 = 1069 , and kp = 0.52. Its d33 · g33, which can characterize this material as a energy density material for energy harvesting device applications, was excellent, being as large as approximately 14,072 × 10−15 m2/N. It was also demonstrated that a unimorph cantilever using the PZT-CN film could generate a significant power of 17.3 mW (2083 μW/cm3) for high performance energy harvesters.